Tools play a key role in the semiconductor industry. As the production stage that is in direct contact with components and products, they are the arbiter of the final product yield. In additional to the technical and performance requirements for the tools themselves, control over the cleanliness of the environmental inside the tools should not be ignored either.

As process line width shrink to the nano level, the threat posed by gaseous molecular contaminants to the production process becomes even more severe. Even trace amounts of contaminants in critical areas of tooling may lead to degradation of component performance, formation of defects, or even impact on the stability and yield of the production process.

Yesiang has designed a family of high-efficiency chemical filters targeted towards the requirements of semiconductor production processes. These are compatible with all types of advanced tools to provide a flexible and highly adaptive AMC control solution.

At the same time, Yesiang is working closely with global semiconductor equipment manufacturers to lay the foundations for next-generation tool filtration technology. Technology co-creation and pioneering development ensures that Yesiang stays on the forefront of tool filtration technology to compete for the AMC control market of next-generation process equipment and to meet the very demanding requirements of the ultra-clean environment in advanced processes.